2015/04/27 by Flavio Wicki, Wicki, Flavio, Jean-Nicolas Longchamp +5
Biochemistry, Genetics and Molecular Biology · Engineering · Materials Science · #Advanced Electron Microscopy Techniques and Applications #Advancements in Photolithography Techniques #Electron and X-Ray Spectroscopy Techniques #FOS: Physical sciences #Instrumentation and Detectors (physics.ins-det) #Mesoscale and Nanoscale Physics (cond-mat.mes-hall)
paper · pdf · doi:10.48550/arxiv.1504.06962
openalex publication_date 2015/04/27 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
We have designed, fabricated and tested a micron-sized electron column with\nan overall length of about 700 microns comprising two electron lenses; a\nmicro-lens with a minimal bore of 1 micron followed by a second lens with a\nbore of up to 50 microns in diameter to shape a coherent low-energy electron\nwave front. The design criteria follow the notion of scaling down source size,\nlens-dimensions and kinetic electron energy for minimizing spherical\naberrations to ensure a parallel coherent electron wave front. All lens\napertures have been milled employing a focused ion beam and could thus be\nprecisely aligned within a tolerance of about 300 nm from the optical axis.\nExperimentally, the final column shapes a quasi-planar wave front with a\nminimal full divergence angle of 4 mrad and electron energies as low as 100 eV.\n