Enhanced quantum efficiency and reduction of reflection for MSM photodetectors with nano-structured surface

2018/08/29 by Ekaterina Ponizovskaya Devine, Devine, Ekaterina Ponizovskaya, Yang Gao +11
Engineering · Materials Science · #Applied Physics (physics.app-ph) #FOS: Physical sciences #Nanowire Synthesis and Applications #Optical Coatings and Gratings #Photonic and Optical Devices

paper · pdf · doi:10.48550/arxiv.1810.00945

openalex publication_date 2018/08/29 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28

Abstract

The photon trapping nano-structures help to enhance quantum efficiency and reduce reflection for MSM photodetector that allows fast Si photodetectors at wavelength 800-950nm. The nanostructure consist of micro holes reduces reflection and bends normally incident light into the lateral modes in the absorbing layer.

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