2004/09/23 by Pasqualantonio Pingue, Pingue, Pasqualantonio, Paolo Baschieri +8
Biochemistry, Genetics and Molecular Biology · Physics and Astronomy · #Advanced Electron Microscopy Techniques and Applications #FOS: Physical sciences #Force Microscopy Techniques and Applications #Materials Science (cond-mat.mtrl-sci) #Surface and Thin Film Phenomena #cond-mat.mtrl-sci
paper · pdf · doi:10.48550/arxiv.cond-mat/0409608
8 pages, 6 figures, submitted to Advanced Materials
arxiv created 2004/09/23 · openalex publication_date 2004/09/23 · arxiv updated 2009/12/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
A home made DSP-controlled scanning probe microscope (SPM) system has been developed and its utilization as a tool for lithography on nanometer scale is reported. User-friendly graphic interface allows to directly perform nanolithography importing a bitmap pattern on previously-imaged sample region, otherwise moving in real time the probe using an ordinary mouse, acting as a pantograph from macroscopic down to nanometer scale, taking advantage from an absolute-positioning stage. Any measured property of the sample can be used by the lithographic interface to realize interactive patterning of the sample. Moreover, the 'contour-mode' permits to move tip at a fixed relative tip-sample distance, exploiting at each step the previously-acquired topographic signal. The instrument has been successfully employed in order to perform local anodic oxidation (LAO) lithography on semiconducting substrates.