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X-ray photoemission study of CoFeB/MgO thin film bi-layers

2007/02/09 by J.C. Read, J. C. Read, P. G. Mather +4
Engineering · Materials Science · Physics and Astronomy · #Aluminum Alloys Composites Properties #Magnetic properties of thin films #Metallurgical and Alloy Processes #cond-mat.mtrl-sci

paper · pdf · doi:10.48550/arxiv.cond-mat/0702232

13 pages, 3 figures

arxiv created 2007/02/09 · arxiv updated 2009/12/01

Abstract

We present results from an X-ray photoemission spectroscopy (XPS) study of CoFeB/MgO bi-layers where we observe process-dependent formation of B, Fe, and Co oxides at the CoFeB/MgO interface due to oxidation of CoFeB during MgO deposition. Vacuum annealing reduces the Co and Fe oxides but further incorporates B into the MgO forming a composite MgBxOy layer. Inserting an Mg layer between CoFeB and MgO introduces an oxygen sink, providing increased control over B content in the barrier.

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