2017/05/14 by Meysam T. Chorsi, Chorsi, Meysam T.
Engineering · Physics and Astronomy · #Advanced MEMS and NEMS Technologies #Classical Physics (physics.class-ph) #FOS: Physical sciences #Mechanical and Optical Resonators #Photonic and Optical Devices
paper · pdf · doi:10.48550/arxiv.1705.07710
openalex publication_date 2017/05/14 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
This research is on the dynamics of electrostatically actuated radial-contour mode microring resonators. The governing equation of motion is derived by the minimization of the Hamiltonian and generalized to include the viscous damping effect. The Galerkin method is used to discretize the distributed-parameter model of the considered ring resonator. The influences of intermolecular forces such as van der Waals and Casimir on the dynamic behavior of the resonator are investigated. The natural frequencies and mode shapes of the ring are calculated for various values of ratio of radii (\beta). The effect of the design parameters including ring radius, electrostatic voltage and quality factor on the dynamic responses, is discussed. The results of present study can be used in the design of novel MEMS resonators, RF filters and channelizers.