Numerical Modeling of MEMS Resonators

2016/11/12 by Hamid T. Chorsi, Chorsi, Hamid T., Meysam T. Chorsi +3 · 2 citations
Engineering · Physics and Astronomy · #Acoustic Wave Resonator Technologies #Advanced MEMS and NEMS Technologies #FOS: Physical sciences #Mechanical and Optical Resonators #Mesoscale and Nanoscale Physics (cond-mat.mes-hall)

paper · pdf · doi:10.48550/arxiv.1611.05310

openalex publication_date 2016/11/12 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28

Abstract

Microelectromechanical systems (MEMS) resonators serve as frequency selective components in applications ranging from biology to communications. In this paper, the dynamic behavior of an RF MEMS disk resonator is formulated using an analytical method.

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