2021/11/25 by Yihong Wang, Wang, Yihong, Bin Zhou +5
Engineering · Materials Science · #Advancements in Photolithography Techniques #Atomic Physics (physics.atom-ph) #FOS: Physical sciences #Optical Coatings and Gratings #Optics (physics.optics) #Surface Roughness and Optical Measurements
paper · pdf · doi:10.48550/arxiv.2111.15628
openalex publication_date 2021/11/25 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
A simple approximation scheme to describe the width of the Voigt profile as a function of the relative contributions of Gaussian and Lorentzian broadening is presented. The proposed approximation scheme is highly accurate and provides accuracy better than 10-17 for arbitrary aLaG ratios. In particular, the accuracy reaches an astonishing 10-34 (quadruple precision) in the domain aLaG less than 0.2371 and aLaG greater than 33.8786.