Fluidic Integration of Nanophotonic Devices Using Decomposable Polymers

2015/03/09 by Ehsan Shah Hosseini, Mehrsa Raeis Zadeh, Hosseini, Ehsan Shah +5
Physics and Astronomy · #FOS: Physical sciences #Optics (physics.optics) #physics.optics

paper · pdf · doi:10.48550/arxiv.1503.02631

arxiv created 2015/03/09 · arxiv updated 2015/03/10

Abstract

Polynorbornene-based decomposable polymer which can be patterned with ultraviolet or electron-beam radiation is used to create micrometer-scale fluidic channels. Silicon nitride substrates are used to fabricate nanophotonic wavegide and resonators operating in the visible range of the spectrum. Fluidic channels generated by thermally decomposing the polymer through the oxide cladding is used to deliver ultra-small amounts of florescent samples to the optical sensors.

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