Direct laser written polymer waveguides with out of plane couplers for\n optical chips

2017/03/24 by Alexander Landowski, Dominik Zepp, Landowski, Alexander +7
Engineering · Physics and Astronomy · #Advanced Fiber Laser Technologies #FOS: Physical sciences #Optics (physics.optics) #Photonic and Optical Devices #Semiconductor Lasers and Optical Devices

paper · pdf · doi:10.48550/arxiv.1703.08488

openalex publication_date 2017/03/24 · openalex created_date 2022/10/05 · openalex updated_date 2026/07/28

Abstract

Optical technologies call for waveguide networks featuring high integration\ndensities, low losses, and simple operation. Here, we present polymer\nwaveguides fabricated from a negative tone photoresist via\ntwo-photon-lithography in direct laser writing, and show a detailed parameter\nstudy of their performance. Specifically, we produce waveguides featuring bend\nradii down to 40 \μm, insertion losses of the order of 10 dB, and loss\ncoefficients smaller than 0.81 dB/mm, facilitating high integration densities\nin writing fields of 300 \μm x 300 \μm. A novel three-dimensional coupler\ndesign allows for coupling control as well as direct observation of outputs in\na single field of view through a microscope objective. Finally, we present\nbeam-splitting devices to construct larger optical networks, and we show that\nthe waveguide material is compatible with the integration of quantum emitters.\n

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