Shallow Au Implantation Into Silicon-On-Insulator Slot Ring Resonator Waveguide Devices

2025/09/17 by Liu, Quan-Shan, Coke, Maddison, Lincoln, Alexander +4
#FOS: Physical sciences #Optics (physics.optics)

paper · doi:10.48550/arxiv.2509.13876

Abstract

The optical transmission spectra of a series of micro-ring resonators (MRRs) are studied following the implantation of gold (Au) ions and subsequent thermal annealing, at temperatures between 500 °C and 700 °C. Whilst we find that this process leads to the ready formation of Au nanoparticles (NPs) on the MRR surface, the cavity optical properties; Q-factor and extinction ratio (ER) are severely degraded, for annealing between 500 °C and 600 °C, but recover again for annealing at 650 °C. For an equivalent (control) MRR, which received no Au implantation, thermal annealing alone was also found to degrade the cavity performance.

Citations

• In situ Thermal Trimming of Waveguides in a Standard Active Silicon Photonics Platform
• Determination of Size and Concentration of Gold Nanoparticles from UV−Vis Spectra

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