Atomic resolution analysis of extended defects and Mg agglomeration in Mg-ion-implanted GaN and their impacts on acceptor formation

2023/09/28 by Emi Kano, Keita Kataoka, Jun Uzuhashi +15
#atom probe tomography #gallium nitride #transmission electron microscopy

paper · doi:10.48505/nims.4232

Abstract

JOURNAL OF APPLIED PHYSICS. 132 [6] (2022)

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