On-machine and in-process surface metrology for precision manufacturing

2019/01/01 by Wei Gao, W. Gao, H. Haitjema +11 · 26 citations
Engineering · #Advanced Measurement and Metrology Techniques #Surface Roughness and Optical Measurements #Advanced Sensor Technologies Research

paper · doi:10.1016/j.cirp.2019.05.005

Citations

• Precision tool setting for fabrication of a microstructure array

Cited by

• Multi-source errors evaluation of machine tools: from research gaps to methodologies and applications
• Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors. [europepmc]
• An Optical Frequency Domain Angle Measurement Method Based on Second Harmonic Generation. [europepmc]
• Phase Compensation of the Non-Uniformity of the Liquid Crystal on Silicon Spatial Light Modulator at Pixel Level. [europepmc]
• Performance Analysis of Surface Reconstruction Algorithms in Vertical Scanning Interferometry Based on Coherence Envelope Detection. [europepmc]
• A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer. [europepmc]
• A New Optical Configuration for the Surface Encoder with an Expanded Z -Directional Measuring Range. [europepmc]
• Smart Manufacturing and Digitalization of Metrology: A Systematic Literature Review and a Research Agenda. [europepmc]
• Quality Definition in Micro Injection Molding Process by Means of Surface Characterization Parameters. [europepmc]
• Combining Photogrammetry and Photometric Stereo to Achieve Precise and Complete 3D Reconstruction. [europepmc]
• In-Situ Measurement and Slow-Tool-Servo Compensation Method of Roundness Error of a Precision Mandrel. [europepmc]
• Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer. [europepmc]
• Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z -Directional Measuring Range. [europepmc]
• Review of Intelligence for Additive and Subtractive Manufacturing: Current Status and Future Prospects. [europepmc]
• Improved Algorithms of Data Processing for Dispersive Interferometry Using a Femtosecond Laser. [europepmc]
• Design and Analysis of Ultra-Precision Smart Cutting Tool for In-Process Force Measurement and Tool Nanopositioning in Ultra-High-Precision Single-Point Diamond Turning. [europepmc]
• Enhanced Data-Processing Algorithms for Dispersive Interferometry Using a Femtosecond Laser. [europepmc]
• Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review. [europepmc]
• High-Precision Chromatic Confocal Technologies: A Review. [europepmc]
• Integration of Metrology in Grinding and Polishing Processes for Rotationally Symmetrical Aspherical Surfaces with Optimized Material Removal Functions. [europepmc]
• A Review on Recent Advances in Signal Processing in Interferometry. [europepmc]
• Interference Field Control for High-Uniformity Nanopatterning: A Review. [europepmc]
• A Review: Absolute Linear Encoder Measurement Technology. [europepmc]
• A Review: Grating Encoder Technologies for Multi-Degree-of-Freedom Spatial Measurement. [europepmc]
• Fringe-Based Structured-Light 3D Reconstruction: Principles, Projection Technologies, and Deep Learning Integration. [europepmc]
• A Review of Optical Metrology Techniques for Advanced Manufacturing Applications. [europepmc]