Damage-free highly efficient polishing of single-crystal diamond wafer by plasma-assisted polishing

2018/01/01 by Kazuya Yamamura, K. Yamamura, Kentaro Emori +13 · 102 citations
Chemistry · Engineering · Materials Science · #Abrasive #Advanced Surface Polishing Techniques #Argon #Chemical vapor deposition #Chemistry #Composite material #Crystal (programming language) #Crystallography #Diamond #Diamond and Carbon-based Materials Research #Materials science #Metal and Thin Film Mechanics #Metallurgy #Optics #Optoelectronics #Plasma #Polishing #Raman spectroscopy #Single crystal #Surface finish #Surface roughness #Wafer

paper · doi:10.1016/j.cirp.2018.04.074

published in CIRP Annals 67(1), 353-356 (Elsevier BV)

openalex publication_date 2018/01/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/08/05

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• Damage-free highly efficient plasma-assisted polishing of a 20-mm square large mosaic single crystal diamond substrate. [europepmc]
• Polishing Approaches at Atomic and Close-to-Atomic Scale. [europepmc]