2014/10/08 by Marco Di Mauro, Marco Mauro, Mauro, Marco +12
Engineering · Physics and Astronomy · #Advanced MEMS and NEMS Technologies #FOS: Physical sciences #Instrumentation and Detectors (physics.ins-det) #Mechanical and Optical Resonators #Photonic and Optical Devices #physics.ins-det
paper · pdf · doi:10.48550/arxiv.1410.1953
5 pages, 4 figures
arxiv created 2014/10/08 · openalex publication_date 2014/10/08 · arxiv updated 2014/10/09 · openalex created_date 2016/06/24 · openalex updated_date 2026/07/28
In this work is presented a microbalance for single microparticle sensing based on resonating AFM cantilever. The variation of the resonator eigenfrequency is related to the particle mass positioned at the free apex of the cantilever. An all-digital phase locked loop (PLL) control system is developed to detect the variations in cantilever eigenfrequency. Two particle populations of different materials are used in the experimental test, demonstrating a mass sensitivity of 15 Hz/pg in ambient conditions. Thereby it is validated the possibility of developing an inexpensive, portable and sensitive microbalance for point-mass sensing.