2021/12/18 by Vinayak Pachkawade, Pachkawade, Vinayak, Zion Tsz Ho Tse +2
Computer Science · Engineering · Physics and Astronomy · #Acoustic Wave Resonator Technologies #Advanced MEMS and NEMS Technologies #FOS: Electrical engineering #FOS: Physical sciences #Instrumentation and Detectors (physics.ins-det) #Sensor Technology and Measurement Systems #Systems and Control (eess.SY) #cs.SY #eess.SY #electronic engineering #information engineering #physics.ins-det
paper · pdf · doi:10.48550/arxiv.2112.09837
23 pages, 9 figures
arxiv created 2021/12/18 · openalex publication_date 2021/12/18 · arxiv updated 2021/12/21 · openalex created_date 2022/05/05 · openalex updated_date 2026/07/28
This paper investigates the performance of the micro-electro-mechanical systems resonant sensor used for particle detection and concentration measurement. These fine and ultra-fine particles such as particulate matter (PM), ferrous particles, and nanoparticles are known to contaminate the atmosphere, fluids used in industrial machines, and food, respectively. The physical principles involved in the target particles accumulating on the sensor are presented. Micro-gravimetric resonators that use piezoelectric and thermally actuated transducers for particle detection and concentration measurement in air and high-viscosity liquids are analyzed. Critical sensor features, such as maximum possible parametric sensitivity, the detection limit of particle size and mass concentration, linear dynamic range, and output stability, are thoroughly evaluated.