2008/05/04 by Timo Koerner, Koerner, Timo, Andreas Heinrich +4
Engineering · Materials Science · Physics and Astronomy · #Diamond and Carbon-based Materials Research #FOS: Physical sciences #Ion-surface interactions and analysis #Materials Science (cond-mat.mtrl-sci) #Metal and Thin Film Mechanics #cond-mat.mtrl-sci
paper · pdf · doi:10.48550/arxiv.0805.0430
arxiv created 2008/05/04 · openalex publication_date 2008/05/04 · arxiv updated 2009/12/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
Carbides stand out because of their high hardness and wear-resistance. Thus these materials are often discussed for coatings of machine tools etc. Within this work Boron Carbide (B4C) and Carbide (C) thin films were deposited on Si (100) substrates by pulsed-laser deposition technique. In order to improve the wear-resistance of the deposited films, we introduced a new working technique including the application of a second excimer laser in a special working mode. Thereby one laser was used to ablate the carbide material from a target and to deposit the material on the substrate. The light of the second laser was directed directly onto the substrate in order to modify the ablated material. We report on details for film deposition and film properties determined by Scanning Electron Microscope, Energy Dispersive X-Ray Spectroscopy, X-Ray Diffraction, Rutherford Backscattering, Raman Spectroscopy and tribological experiments.