A Plasma-Based Approach for High-Power Tunable Microwave Varactors

2024/04/28 by Samsud Moon, Moon, Samsud
Engineering · #Microwave Engineering and Waveguides

paper · pdf · doi:10.48550/arxiv.2404.18068

Abstract

This work presents a tunable varactor with tunability in the range of 100s of MHz and a capacitance delta of about 36 pF by employing a perpendicular magnetic field to a capacitively-coupled (CCP) RF plasma cell. A comprehensive high-frequency circuit model for the fabricated varactor is proposed and verified experimentally for a plasma electron number density of 2.95×10¹⁷m^-3 which has a tunability of 146 MHz with a magnetic flux density ranging from 0 to 246 milliTesla. Under a pressure of 64 milliTorrs, the Argon ccp was found to have a variable capacitance ranging from 4 pF to 41.72 pF.

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