2021/10/07 by Lillian Thiel, Thiel, Lillian, Alan D. Logan +12
Engineering · Physics and Astronomy · #Advanced Fiber Laser Technologies #Applied Physics (physics.app-ph) #Cladding (metalworking) #Computer science #Electron-beam lithography #FOS: Physical sciences #Fabrication #Gallium nitride #Gallium phosphide #Hydrogen silsesquioxane #Laser #Materials science #Mechanical and Optical Resonators #Nanotechnology #Optics #Optics (physics.optics) #Optoelectronics #Photonic and Optical Devices #Photonics #Physics #Resist #Resonator #Second-harmonic generation #Silicon #Silicon nitride #Trimming #Wavelength #physics.app-ph #physics.optics
paper · pdf · doi:10.48550/arxiv.2110.03612
openalex publication_date 2021/10/07 · arxiv created 2021/10/08 · arxiv updated 2021/10/11 · openalex created_date 2025/10/10 · openalex updated_date 2026/08/04
We demonstrate post-fabrication target-wavelength trimming with a gallium\nphosphide on silicon nitride integrated photonic platform using controlled\nelectron-beam exposure of hydrogen silsesquioxane cladding. A linear\nrelationship between the electron-beam exposure dose and resonant wavelength\nred-shift enables deterministic, individual trimming of multiple devices on the\nsame chip to within 30 pm of a single target wavelength. Second harmonic\ngeneration from telecom to near infrared at a target wavelength is shown in\nmultiple devices with quality factors on the order of 104. Post-fabrication\ntuning is an essential tool for targeted wavelength applications including\nquantum frequency conversion\n