A network of parametrically driven silicon nitride mechanical membranes

2025/06/01 by Luis Mestre, Suyash Kumar Singh, Mestre, Luis +9 · 1 citation
Engineering · #Advanced MEMS and NEMS Technologies #Modular Robots and Swarm Intelligence

paper · pdf · doi:10.48550/arxiv.2506.00850

Abstract

Networks of nonlinear resonators offer a promising platform for analog computing and the emulation of complex systems. However, realizing such networks remains challenging, as it requires resonators with high quality factors, individual frequency tunability, and strong inter-resonator coupling. In this work, we present a system that meets all these criteria. Our system is based on metallized silicon nitride membranes that are coupled via their common substrate and controlled capacitively via electrodes. We demonstrate individual frequency tuning and strong parametric driving of each membrane. Notably, we tune membrane frequencies through avoided crossings and demonstrate tunability of the coupled membrane's parametric response. This platform provides a scalable and controllable setting for exploring collective phenomena, dynamical phase transitions, nonlinear topology, and analog computing.

Citations

• Three Strongly Coupled Kerr Parametric Oscillators Forming a Boltzmann Machine
• The parametric instability landscape of coupled Kerr parametric oscillators
• Critical Dynamics and Cyclic Memory Retrieval in Non-reciprocal Hopfield Networks
• Room temperature, cavity-free capacitive strong coupling to mechanical motion
• Strong Thermomechanical Noise Squeezing Stabilized by Feedback
• Robustness and resilience of complex networks
• Tracking the Distance to Criticality in Systems with Unknown Noise
• A biased Ising model using two coupled Kerr parametric oscillators with external force
• Ising machines as hardware solvers of combinatorial optimization problems
• The role of fluctuations in quantum and classical time crystals
• Ising machines with strong bilinear coupling

Cited by

• Kibble-Zurek mechanism for dissipative discrete time crystals

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