2025/11/04 by Hyatt, Atkin D., Flores, Oscar A., Agrawal, Aman R. +2 · 1 citation
#Applied Physics (physics.app-ph) #FOS: Physical sciences #Mesoscale and Nanoscale Physics (cond-mat.mes-hall)
paper · doi:10.48550/arxiv.2511.02166
Silicon nitride membranes are a powerful and ubiquitous optomechanical resonator technology, enabling high mechanical Q, low optical loss, and enhanced optomechanical coupling via a panoply of strain-, phononic-, and photonic-crystal engineering techniques. Fabrication and characterization of silicon nitride membranes has become a form of tacit knowledge in optomechanics research groups. Here we present a video run-through of the design, fabrication, and characterization of a contemporary silicon nitride membrane resonator (specifically, a centimeter-scale Si3N4 nanoribbon supporting Q>108 torsion modes). Our tutorial can serve as a starting point or refresher for practitioners in the field.