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Non-destructive and Rapid Evaluation of CVD Graphene by Dark Field Optical Microscopy

2013/05/24 by Xianghua Kong, Kong, Xianghua, Hengxing Ji +15
Physics and Astronomy · #FOS: Physical sciences #Materials Science (cond-mat.mtrl-sci) #cond-mat.mtrl-sci

paper · pdf · doi:10.48550/arxiv.1305.5754

17 pages, including 4 figures and 5 supporting figures

arxiv created 2013/05/24 · arxiv updated 2013/05/27

Abstract

Non-destructive and rapid evaluation of graphene directly on the growth substrate (Cu foils) by dark field (DF) optical microscopy is demonstrated. Without any additional treatment, graphene on Cu foils with various coverages can be quickly identified by DF imaging immediately after chemical vapor deposition growth with contrast comparable to scanning electron microscopy. The improved contrast of DF imaging compared to bright field optical imaging was found to be due to Rayleigh scattering of light by the copper steps beneath graphene. Indeed, graphene adlayers are readily distinguished, due to the different height of copper steps beneath graphene regions of different thickness.

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