2018/11/13 by Jingxuan Cai, Cai, Jingxuan, Wen‐Di Li +2
Engineering · Physics and Astronomy · #Advancements in Photolithography Techniques #Applied Physics (physics.app-ph) #FOS: Physical sciences #Metal and Thin Film Mechanics #Nanofabrication and Lithography Techniques #physics.app-ph
paper · pdf · doi:10.48550/arxiv.1811.05103
openalex publication_date 2018/11/13 · arxiv created 2019/07/01 · arxiv updated 2019/07/02 · openalex created_date 2019/07/12 · openalex updated_date 2026/07/28
A model has been developed to study the dynamic filling process and to investigate the capillary force-induced deformation of nanostructures on the imprint mold during ultraviolet nanoimprint lithography (UV-NIL) down to sub-10 nm resolution. The dynamic behavior of resist filling with varied physical parameters was investigated by a hydrodynamic model. The capillary force-induced deformation of mold structures was modeled using beam bending mechanics for both wetting and non-wetting mold structures. Theoretically calculated results were cross-validated with finite-element simulations using two-phase flow and solid mechanics methods. Based on the theoretical analysis, a general parameter of critical aspect ratio for design of imprint mold for UV-NIL is developed. The investigation of capillary force-induced deformation in UV-NIL helps to deepen the understanding of dynamic mechanism of resist filling and structural deformation at sub-10 nm scale and enable optimization for high-fidelity UV-NIL.