Nomarski differential interference contrast microscopy for surface slope measurements: an examination of techniques

1981/08/01 by J. S. Hartman, John Hartman, R. L. Gordon +3 · 4 citations
Computer Science · Engineering · Mathematics · #Advanced Measurement and Metrology Techniques #Computer science #Contrast (vision) #Differential interference contrast microscopy #Intensity (physics) #Interference (communication) #Interference microscopy #Materials science #Mathematical analysis #Mathematics #Maxima and minima #Microscope #Microscopy #Optical measurement and interference techniques #Optics #Physics #Surface Roughness and Optical Measurements

paper · doi:10.1364/ao.20.002665

openalex publication_date 1981/08/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/23

Abstract

Alternate measurement and data analysis procedures are discussed and compared for the application of reflective Nomarski differential interference contrast microscopy for the determination of surface slopes. The discussion includes the interpretation of a previously reported iterative procedure using the results of a detailed optical model and the presentation of a new procedure based on measured image intensity extrema. Surface slope determinations from these procedures are presented and compared with results from a previously reported curve fit analysis of image intensity data. The accuracy and advantages of the different procedures are discussed.

Citations

• Quantitative surface topography determination by Nomarski reflection microscopy 2: Microscope modification, calibration, and planar sample experiments

Cited by

• Distinct modulated pupil function system for real-time imaging of living cells. [europepmc]
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• Video-rate quantitative phase analysis by a DIC microscope using a polarization camera. [europepmc]
• Minimizing scattering-induced phase errors in differential interference contrast microscopy. [europepmc]

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