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X-ray Absorption Study of Pulsed Laser Deposited Boron Nitride Films

1993/11/26 by A. Chaiken, Chaiken, A., L. J. Terminello +10
Engineering · Materials Science · Physics and Astronomy · #Boron and Carbon Nanomaterials Research #Condensed Matter (cond-mat) #Diamond and Carbon-based Materials Research #FOS: Physical sciences #Metal and Thin Film Mechanics #cond-mat

paper · pdf · doi:10.48550/arxiv.cond-mat/9311058

7 pages, LaTeX 2.09. Figures not included, but available by fax. Send email to [email protected]

arxiv created 1993/11/26 · openalex publication_date 1993/11/26 · arxiv updated 2009/11/30 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28

Abstract

B and N K-edge x-ray absorption spectroscopy measurements have been performed on three BN thin films grown on Si substrates using ion-assisted pulsed laser deposition. Comparison of the films' spectra to those of several single-phase BN powder standards shows that the films consist primarily of sp2 bonds. Other features in the films' spectra suggest the presence of secondary phases, possibly cubic or rhombohedral BN. Films grown at higher deposition rates and higher ion-beam voltages are found to be more disordered, in agreement with previous work.

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