2023/12/25 by Xi Yang, Yang, Xi, Victor Smaluk +3
Biochemistry, Genetics and Molecular Biology · Engineering · Materials Science · #Advanced Electron Microscopy Techniques and Applications #Applied Physics (physics.app-ph) #Electron and X-Ray Spectroscopy Techniques #FOS: Physical sciences #Integrated Circuits and Semiconductor Failure Analysis
paper · pdf · doi:10.48550/arxiv.2312.15802
openalex publication_date 2023/12/25 · openalex created_date 2023/12/29 · openalex updated_date 2026/07/28
To optimize electron energy toward in-situ imaging large bio-samples up to 10-um thickness with nanoscale resolution, we implemented an analytical model based on elastic and inelastic characteristic angles [1]. This model can be used to predict the transverse beam size broadening as a function of electron energy while the probe beam traverses through the sample. As result, the optimal choice of the electron beam energy can be realized. While the sample thickness is less than 10 um, there exists an optimal electron beam energy below 10 MeV regarding a specific sample thickness. However, for samples thicker than 10 um, the optimal beam energy is 10 MeV, and the ultimate resolution could become worse with the increase of the sample thickness.