2023/02/02 by Faysal Hakim, Hakim, Faysal, N. G. Rudawski +5
Engineering · Materials Science · #Acoustic Wave Resonator Technologies #Acoustics #Advanced Sensor and Energy Harvesting Materials #Applied Physics (physics.app-ph) #Computer science #Electrical engineering #Electronic engineering #Engineering #FOS: Physical sciences #Ferroelectric and Piezoelectric Materials #Materials science #Mesoscale and Nanoscale Physics (cond-mat.mes-hall) #Microwave #Optoelectronics #Physics #Resonator #Scalability #Telecommunications
paper · pdf · doi:10.48550/arxiv.2302.01411
published in arXiv (Cornell University) (Cornell University)
openalex publication_date 2023/02/02 · openalex created_date 2025/10/10 · openalex updated_date 2026/08/06
Wireless communication through dynamic spectrum allocation over microwave bands, essential to accommodate exponentially growing data traffic, requires massive array of radio-frequency (RF) filters for adaptive signal shaping at arbitrary frequencies. However, conventional RF filters based on planar acoustic resonators are incapable to realize such massive integrated arrays, due to their large footprint and limited on-chip frequency scalability. Here, we present a signal processor enabled by integration of three-dimensional ferroelectric-gate fin (FGF) nano-acoustic resonators with extreme frequency tailorability and large-scale integrability. FGFs are created by growing atomic-layered ferroelectric hafnia-zirconia transducers on silicon nano-fins, operate in bulk acoustic modes with lithographically scalable frequency over 3-28 GHz, and provide record high frequency - quality factor - electromechanical coupling product (f.Q.kt2) of 19.4 x 1010 (at ~11GHz). A monolithic filter-array covering 9-12 GHz is also demonstrated by on-chip electrical coupling of FGFs. This demonstration highlights the potential of FGF resonators to realize chip-scale adaptive processors extendable to millimeter-wave frequencies.