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Single-Sided Contacting of Out-of-Plane Polarized Piezo Films for Fluid Membrane Lenses

2016/03/30 by Moritz Stürmer, Stürmer, Moritz, Matthias C. Wapler +3
Engineering · Materials Science · Physics and Astronomy · #Electrowetting and Microfluidic Technologies #FOS: Physical sciences #Modular Robots and Swarm Intelligence #Optics (physics.optics) #Surface Modification and Superhydrophobicity #physics.optics

paper · pdf · doi:10.48550/arxiv.1603.09316

To be presented at ACTUATOR 2016, 15th International Conference on New Actuators: http://www.actuator.de

arxiv created 2016/03/30 · openalex publication_date 2016/03/30 · arxiv updated 2016/03/31 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28

Abstract

We present an adaptive lens which tunes its focal length with a glass membrane that is deformed by an integrated piezo bending actuator. A particular challenge in the fabrication of this type of actuator is the need to contact the electrodes on both sides of the piezo element, i.e. also on the glass surface. Therefore, we show a novel contacting method where the top electrode on the piezo is segmented and the backside electrode is left at a floating potential. With this setup we achieve tuning capabilities of more than 13 dpt and response times in the range of less than 4 ms at a usable aperture of 4.5 mm.

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