Mathias Franz

1. Low-temperature ALD of metallic cobalt using the CoCOhept precursor: Simulation-assisted process development for deposition on temperature sensitive 3D-structures
   2025/02/27 by Mathias Franz, Linda Jäckel, Xiao Hu +10 · 5 voices
   Materials Science · Engineering · #Catalytic Processes in Materials Science #Semiconductor materials and devices #Additive Manufacturing and 3D Printing Technologies