M. Kehrle

1. Nanolithography by non-contact AFM induced local oxidation : Fabrication of tunneling barriers suitable for single electron devices
   1998/05/27 by B. Irmer, Bernd Irmer, M. Kehrle +6 · 1 citation
   Biochemistry, Genetics and Molecular Biology · Physics and Astronomy · #Advanced Electron Microscopy Techniques and Applications #FOS: Physical sciences #Force Microscopy Techniques and Applications #Mesoscale and Nanoscale Physics (cond-mat.mes-hall) #Surface and Thin Film Phenomena #cond-mat.mes-hall