Thomas Mussenbrock

1. PECVD and PEALD on polymer substrates (Part II): Understanding and tuning of barrier and membrane properties of thin films
   2023/06/26 by Teresa de los Arcos, Arcos, Teresa de los, Peter Awakowicz +41 · 1 citation
   Materials Science · #Block Copolymer Self-Assembly #Corrosion Behavior and Inhibition #Electron and X-Ray Spectroscopy Techniques #FOS: Physical sciences #Materials Science (cond-mat.mtrl-sci) #Soft Condensed Matter (cond-mat.soft)
2. Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
   2023/03/27 by Katharina Noesges, Maximilian Klich, Noesges, Katharina +13 · 1 citation
   Engineering · #Electrostatic Discharge in Electronics #FOS: Physical sciences #Plasma Diagnostics and Applications #Plasma Physics (physics.plasm-ph) #Semiconductor materials and devices