2023/06/26 by Teresa de los Arcos, Peter Awakowicz, Arcos, Teresa de los +41 · 1 citation
Materials Science · #Block Copolymer Self-Assembly #Corrosion Behavior and Inhibition #Electron and X-Ray Spectroscopy Techniques #FOS: Physical sciences #Materials Science (cond-mat.mtrl-sci) #Soft Condensed Matter (cond-mat.soft)
paper · pdf · doi:10.48550/arxiv.2306.14797
openalex publication_date 2023/06/26 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
This feature article presents insights concerning the correlation of PECVD and PEALD thin film structures with their barrier or membrane properties. While in principle similar precursor gases and processes can be applied, the adjustment of deposition parameters for different polymer substrates can lead to either an effective diffusion barrier or selective permeabilities. In both cases the understanding of the film growth and the analysis of the pore size distribution and the pore surface chemistry is of utmost importance for the understanding of the related transport properties of small molecules. In this regard the article presents both concepts of thin film engineering and analytical as well as theoretical approaches leading to a comprehensive description of the state of the art in this field. Moreover, based on the presented correlation of film structure and molecular transport properties perspectives of future relevant research in this area is presented.