D. F. Klemperer

1. Mass spectrometric studies of plasma etching of silicon nitride
   1985/11/01 by P. E. Clarke, D. Field, A.J. Hydes +5 · 1 citation
   Engineering · Materials Science · #Diamond and Carbon-based Materials Research #Plasma Diagnostics and Applications #Semiconductor materials and devices
2. Spectroscopic studies of fluorescent emission in plasma etching of silicon nitride
   1988/03/01 by D. Field, Derek F. Klemperer, D. F. Klemperer +1 · 1 citation
   Engineering · Materials Science · #Diamond and Carbon-based Materials Research #Plasma Diagnostics and Applications #Semiconductor materials and devices