Katja Höflich
- Roadmap for focused ion beam technologies
2023/05/31 by Katja Höflich, Höflich, Katja, G. Hobler +59 · 7 citations
Engineering · Materials Science · #Electron and X-Ray Spectroscopy Techniques #FOS: Physical sciences #Instrumentation and Detectors (physics.ins-det) #Integrated Circuits and Semiconductor Failure Analysis #Ion-surface interactions and analysis #Materials Science (cond-mat.mtrl-sci)