Jeffrey W. Elam

1. Benchmarking large language models for materials synthesis: The case of atomic layer deposition
   2025/04/09 by Ángel Yanguas-Gil, Angel Yanguas-Gil, Matthew T. Dearing +6 · 1 voice · 6 citations
   Engineering · Materials Science · #Semiconductor materials and devices #Electronic and Structural Properties of Oxides #Ferroelectric and Negative Capacitance Devices
2. Modeling scale-up of particle coating by atomic layer deposition
   2024/08/23 by Angel Yanguas-Gil, Ángel Yanguas-Gil, Jeffrey W. Elam +2 · 1 voice · 1 citation
   Engineering · Materials Science · #Copper Interconnects and Reliability #Semiconductor materials and devices #Surface Roughness and Optical Measurements #cond-mat.mtrl-sci #physics.app-ph #physics.chem-ph
3. Modeling scale-up of particle coating by atomic layer deposition
   2024/12/24 by Ángel Yanguas-Gil, Jeffrey W. Elam · 1 voice · 1 citation
   Engineering · Materials Science · #Catalytic Processes in Materials Science #Electronic and Structural Properties of Oxides #Semiconductor materials and devices