Carey, Benjamin J.

1. Precision optomechanical accelerometer via hybrid test mass integration
   2025/08/22 by Bawden, Nathaniel, Carey, Benjamin J., Yeo, Poh-Meng +7 · 3 citations
   #Applied Physics (physics.app-ph) #FOS: Physical sciences
2. Silicon Double-Disk Optomechanical Resonators from Wafer-Scale Double-Layered Silicon-on-Insulator
   2024/08/01 by Amy Navarathna, Navarathna, Amy, Benjamin J. Carey +7 · 1 citation
   Engineering · Physics and Astronomy · #Advanced MEMS and NEMS Technologies #FOS: Physical sciences #Mechanical and Optical Resonators #Optics (physics.optics) #Photonic and Optical Devices #Quantum Physics (quant-ph)