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Mochi, Iacopo
Extreme ultraviolet lithography reaches 5 nm resolution
2024/02/28 by
Giannopoulos, Iason
,
Mochi, Iacopo
,
Vockenhuber, Michaela
+2 · 2 citations
#Applied Physics (physics.app-ph)
#FOS: Physical sciences
#Optics (physics.optics)