K. Emori
- Damage-free highly efficient polishing of single-crystal diamond wafer by plasma-assisted polishing
2018/01/01 by Kazuya Yamamura, K. Yamamura, Kentaro Emori +13 · 7 citations
Chemistry · Engineering · Materials Science · #Abrasive #Advanced Surface Polishing Techniques #Argon #Chemical vapor deposition #Chemistry #Composite material #Crystal (programming language) #Crystallography #Diamond #Diamond and Carbon-based Materials Research #Materials science #Metal and Thin Film Mechanics #Metallurgy #Optics #Optoelectronics #Plasma #Polishing #Raman spectroscopy #Single crystal #Surface finish #Surface roughness #Wafer