Damage-free highly efficient polishing of single-crystal diamond wafer by plasma-assisted polishing

2018/01/01 by Kazuya Yamamura, K. Yamamura, Kentaro Emori +13 · 7 citations
Materials Science · Engineering · #Diamond and Carbon-based Materials Research #Advanced Surface Polishing Techniques #Metal and Thin Film Mechanics

paper · doi:10.1016/j.cirp.2018.04.074

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• Energy beam-based direct and assisted polishing techniques for diamond: A review
• Review of physicochemical-assisted nanomanufacturing processes for wide-bandgap semiconductor wafers
• Damage-free highly efficient plasma-assisted polishing of a 20-mm square large mosaic single crystal diamond substrate. [europepmc]
• Polishing Approaches at Atomic and Close-to-Atomic Scale. [europepmc]