Masaki Ueda

1. Plasma assisted polishing of single crystal SiC for obtaining atomically flat strain-free surface
   2011/01/01 by Kazuya Yamamura, K. Yamamura, Tatsuya Takiguchi +9 · 16 citations
   Materials Science · Engineering · #Diamond and Carbon-based Materials Research #Advanced Surface Polishing Techniques #Metal and Thin Film Mechanics