T. T. Sheng
- Microstructure, growth, resistivity, and stresses in thin tungsten films deposited by rf sputtering
1973/06/01 by P. M. Petroff, T. T. Sheng, A. K. Sinha +2 · 7 citations
Engineering · Materials Science · Physics and Astronomy · #Metal and Thin Film Mechanics #Copper Interconnects and Reliability #Semiconductor materials and interfaces