Azmain A. Hossain

1. Isotropic atomic layer etching of MgO-doped lithium niobate using sequential exposures of H₂ and SF₆ plasmas
   2023/10/16 by Ivy I. Chen, Chen, Ivy I., Jennifer Solgaard +16 · 2 citations
   Engineering · #Advanced Fiber Optic Sensors #FOS: Physical sciences #Materials Science (cond-mat.mtrl-sci) #Mesoscale and Nanoscale Physics (cond-mat.mes-hall) #Optics (physics.optics) #Photonic and Optical Devices #Semiconductor Lasers and Optical Devices
2. Isotropic plasma-thermal atomic layer etching of aluminum nitride using SF₆ plasma and Al(CH₃)₃
   2022/08/31 by Haozhe Wang, Wang, Haozhe, Azmain A. Hossain +5 · 1 citation
   Engineering · Physics and Astronomy · #FOS: Physical sciences #GaN-based semiconductor devices and materials #Mesoscale and Nanoscale Physics (cond-mat.mes-hall) #Plasma Diagnostics and Applications #Semiconductor materials and devices