Effect of ion bombardment on the chemical properties of crystalline tantalum pentoxide films

2019/04/22 by Israel Pérez, Israel Perez, Vı́ctor Sosa +7 · 1 citation
Engineering · Materials Science · #Semiconductor materials and devices #Ga2O3 and related materials #Metal and Thin Film Mechanics

paper · doi:10.1016/j.vacuum.2019.04.037

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