Magnetron sputtering: a review of recent developments and applications

2000/03/01 by P.J Kelly, Peter Kelly, R.D Arnell +1 · 7 citations
Engineering · Materials Science · #Metal and Thin Film Mechanics #High-Temperature Coating Behaviors #Diamond and Carbon-based Materials Research

paper · doi:10.1016/s0042-207x(99)00189-x

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