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Unambiguous determination of thickness and dielectric function of thin films by spectroscopic ellipsometry

1984/03/01 by H. Arwin, Hans Arwin, D. E. Aspnes +1
Physics and Astronomy · Chemistry · #Spectroscopy and Quantum Chemical Studies #Electrochemical Analysis and Applications #Force Microscopy Techniques and Applications

paper · doi:10.1016/0040-6090(84)90019-1

Citations