Particle lofting from substrate exposed to plasma and electron beam

2020/11/18 by Pavel Krainov, Krainov, P. V., V. V. Ivanov +11
Engineering · Physics and Astronomy · #Applied Physics (physics.app-ph) #Computational Physics (physics.comp-ph) #Dust and Plasma Wave Phenomena #FOS: Physical sciences #Ion-surface interactions and analysis #Laser-induced spectroscopy and plasma #Plasma Physics (physics.plasm-ph)

paper · pdf · doi:10.48550/arxiv.2011.09204

openalex publication_date 2020/11/18 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28

Abstract

A nanometer-sized dielectric particle lying on a dielectric substrate is exposed to the flux of low-energy electrons, ion and electron fluxes from a cold plasma and the fluxes from the combination of these two sources with the help of particle-in-cell simulation to investigate the particle lofting phenomenon. The results are of interest for dust mitigation in the semiconductor industry, the lunar exploration, and the explanation of the dust levitation.

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