2021/03/30 by Chirag C. Palekar, Chirag Chandrakant Palekar, Palekar, Chirag Chandrakant +3
Engineering · Physics and Astronomy · #Applied Physics (physics.app-ph) #FOS: Physical sciences #Mechanical and Optical Resonators #Optics (physics.optics) #Photonic Crystals and Applications #Photonic and Optical Devices #physics.app-ph #physics.optics
paper · pdf · doi:10.48550/arxiv.2103.16548
arxiv created 2021/03/30 · openalex publication_date 2021/03/30 · arxiv updated 2021/03/31 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
Complex optical systems such as high-quality microcavities enabled by advanced lithography and processing techniques paved the way to various light-matter interactions (LMI) studies. Without lattice-matching constraints in epitaxy, coating techniques or shaky open cavity constructions, sub-micrometer-precise lithographic development of a polymer photoresist paves the way to polymer microcavity structures for various spectral regions based on the material's transparency and the geometrical sizes. We introduce a new approach based on 3D nanowriting in photoresist, which can be employed to achieve microscopic photonic Fabry-Pérot cavity structures with mechanically-tunable resonator modes and polymer/air Bragg mirrors, directly on a chip or device substrate. We demonstrate by transfer-matrix calculations and computer-assisted modelling that open microcavities with up to two "air-Bragg" reflectors comprising alternating polymer/air mirror-pair layers enable compression-induced mode tuning that can benefit many LMI experiments, such as with 2D materials, nanoparticles and molecules.