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Fabrication of a 3D mode size converter for efficient edge coupling in photonic integrated circuits

2024/11/25 by Hyeong‐Soon Jang, Hyungjun Heo, Jang, Hyeong-Soon +15
Engineering · #Advanced Photonic Communication Systems #Applied Physics (physics.app-ph) #FOS: Physical sciences #Optics (physics.optics) #Photonic and Optical Devices #Semiconductor Lasers and Optical Devices

paper · pdf · doi:10.48550/arxiv.2411.16221

openalex publication_date 2024/11/25 · openalex created_date 2024/12/04 · openalex updated_date 2026/07/28

Abstract

We demonstrate efficient edge couplers by fabricating a 3D mode size converter on a lithium niobate-on-insulator photonic platform. The 3D mode size converter is fabricated using an etching process that employs a Si external mask to provide height variation and adjust the width variation through tapering patterns via lithography. The measured edge coupling efficiency with a 3D mode size converter was approximately 1.16 dB/facet for the TE mode and approximately 0.71 dB/facet for the TM mode at a wavelength of 1550 nm.

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