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Hard X-ray grazing incidence ptychography: Large field-of-view nanostructure imaging with ultra-high surface sensitivity

2023/07/04 by Peter Stanley Jørgensen, L. Besley, Jørgensen, P. S. +19 · 1 citation
Engineering · Physics and Astronomy · #Advanced X-ray Imaging Techniques #Applied Physics (physics.app-ph) #Astrophysical Phenomena and Observations #FOS: Physical sciences #Optics (physics.optics) #Particle Accelerators and Free-Electron Lasers

paper · pdf · doi:10.48550/arxiv.2307.01735

openalex publication_date 2023/07/04 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/30

Abstract

We demonstrate a technique that allows highly surface sensitive imaging of nanostructures on planar surfaces over large areas, providing a new avenue for research in materials science, especially for in situ applications. The capabilities of hard X-ray grazing incidence ptychography combine aspects from imaging, reflectometry and grazing incidence small angle scattering in providing large field-of-view images with high resolution transverse to the beam, horizontally and along the surface normal. Thus, it yields data with resolutions approaching electron microscopy, in two dimensions, but over much larger areas and with a poorer resolution in the third spatial dimension, along the beam propagation direction. Similar to grazing incidence small angle X-ray scattering, this technique facilitates the characterization of nanostructures across statistically significant surface areas or volumes within potentially feasible time frames for in situ experiments, while also providing spatial information.

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