Design, development and validation of electron ionisation models for nano-scale simulation

2010/12/03 by Hee Seo, Maria Grazia Pia, Seo, H. +5
Engineering · Materials Science · Physics and Astronomy · #Atomic and Molecular Physics #Computational Physics (physics.comp-ph) #Electron and X-Ray Spectroscopy Techniques #FOS: Physical sciences #Semiconductor materials and devices

paper · pdf · doi:10.48550/arxiv.1012.0662

openalex publication_date 2010/12/03 · openalex created_date 2025/10/10 · openalex updated_date 2026/08/01

Abstract

Two theory-driven models of electron ionization cross sections, the Binary-Encounter-Bethe model and the Deutsch-Märk model, have been design and implemented; they are intended to extend the simulation capabilities of the Geant4 toolkit. The resulting values, along with the cross sections included in the EEDL data library, have been compared to an extensive set of experimental data, covering more than 50 elements over the whole periodic table.

Citations

• Geant4 developments and applications

Related

• Experimental cross sections for K-shell ionization by electron impact
• A programme for electron-impact broadening parameter calculations of ionized rare-earth element lines
• Electron Impact Ionization of Atoms
• Re-engineering a nanodosimetry Monte Carlo code into Geant4: software design and first results
• Development of simulation package for atomic processes of ultra-large-scale system based on electronic structure theory