2021/12/24 by M. Chaudhuri, Chaudhuri, M., A. Yakunin +5
Engineering · #FOS: Physical sciences #Ion-surface interactions and analysis #Laser-induced spectroscopy and plasma #Plasma Diagnostics and Applications #Plasma Physics (physics.plasm-ph)
paper · pdf · doi:10.48550/arxiv.2112.13073
openalex publication_date 2021/12/24 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
Extreme ultraviolet (EUV) induced pulsed plasma is unique due to its transient characteristics: the plasma switches between non-thermal state (when EUV power is ON at the beginning of the pulse) and thermal state (end of the pulse at ~ 20 us). It is shown that although electron drag force acting on nm size particles in hydrogen plasma is negligible compared to the ion drag force at the beginning of the pulse, however it can be dominant at the end of the pulse and can play important role in particle transport leading to defectivity issues for semiconductor chip production technologies.